HOME > Product search by CategoryGlass productsSpacer glass

Spacer glass


Spacer glass   Suitable for multilayer packaging by combining with semiconductor wafers such as MEMS devices.


Wafer image
Improve bonding yield with device wafers
● Control sagging around the holes
● Minimize chipping size
  ・≦10μm is available
●Remove microcracks from machined surface to control the particles
   ・Prevent malfunctions in bonding with MEMS devices
Standard specifications
Material Glass
Glass size ≦φ200mm
Min. thickness 0.15mm
Thickness tolerance ±0.01mm
Min. hole size φ0.3mm
Window shape upon request
Window size tolerance ±0.02mm
Chipping size ≦100μm
Cross-section shape Straight / Taper / Step
Metallization process Available
Note: These are standard specifications.
In case you have any request other than these, please feel free to contact us.
Fig. A B arrow Fig. A B   Illustration

End user market / Applications

・Display devices for projectors,etc
・RF-switches/relays for mobile devices such as smartphones, portable video games, digital cameras, car navigation systems,
・Analytical chips for DNA/drug-discovery-screening analyzers,etc
・Microreactors for biochemical reaction/electrophoresis analyzers,etc
・Bioreactors for chemical sensors, microorganism-detection sensors,etc
・Industrial gas-detection sensors,etc
・RF-MEMS switches.
・Image sensors,etc
・Pressure sensors, Acceleration sensors.
The inquiry about a product is here.