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Metallizing

Sputtering

Patterned metallization is available on glass, ceramic, silicon, etc, by sputtering.
・Sputtering layers: Ti/Pt/Au, Cr/Pt/Au, Cr/Ni/Au
 
Metallization on ceramic   Glass wafer
Before (left) and after sputtering    
Metallization on ceramic   Glass wafer
Before (left) and after sputtering
   
 
 
 
Products processed by this technology
Microchannel cooler
Microchannel cooler
 
Insulation type
Cu-AlN-Cu Submounts
Insulation type Cu-AlN-Cu Submounts
 
High pressure Seamless
microchannels
High pressure Seamless microchannels
 
Mounts / Carriers
Mounts / Carriers
 
CuW submount
CuW submount
 
Through glass via (TGV)
Through glass via (TGV)
 
Micro-hole glass
Micro-hole glass
 
Cavity glass/Cap glass
Cavity glass/Cap glass
 
Mesh glass
Mesh glass
 
  
PAGETOP
 

Vapor deposition

AuSn vapor deposition is available on all kinds of products, not only single metal/ceramics, but also assembled parts. It can lead to high-quality bonding to LD laser, resulting in a longer life of customers’ products.
 
Microchannel cooler   Mounts / Carriers    
Microchannel cooler   Mounts / Carriers    
 
 
 
Products processed by this technology
CuW submount
CuW submount
 
Insulation type Cu-AlN-Cu Submounts
Insulation type Cu-AlN-Cu Submounts
 
 
 
 
PAGETOP
 

Plating

Patterned metallization is available on glass, ceramic, silicon etc.
・Local plating or plating even/uneven surface of Au or Cu is available.
 
Through-via made by sandblasting can be a metal via when sputtered and plated, and seal silicon devices.  

 Metallization + Bump

 
Through-via made by sandblasting can be a metal via when sputtered and plated, and seal silicon devices.            Metallization + Bump  
 
 
 
Products processed by this technology
Microchannel cooler
Microchannel cooler
 
Insulation type Cu-AlN-Cu Submounts
Insulation type Cu-AlN-Cu Submounts
 
High pressure Seamless
microchannels
High pressure Seamless microchannels
 
Mounts / Carriers
Mounts / Carriers
 
CuW submount
CuW submount
 
Through glass via (TGV)
Through glass via (TGV)
 
Micro-hole glass
Micro-hole glass
 
Cavity glass/Cap glass
Cavity glass/Cap glass
 
Mesh glass
Mesh glass
 
 
 
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